Microelectromechanical systems (MEMS) are devices that integrate mechanical and electrical components at the microscale. MEMS have applications in various fields, such as sensors, actuators, optics, communication, biomedical, and energy. However, designing and analyzing MEMS devices can be challenging due to the complex physical phenomena involved, the fabrication constraints, and the performance trade-offs. In this article, we will review a book that aims to help students, researchers, and engineers to understand the operational principles of microsystems and to design them effectively. The book is called Practical MEMS and was written by Ville Kaajakari, a professor of electrical engineering at Louisiana Tech University and an expert in MEMS design and fabrication. We will also discuss some of the challenges and opportunities that the MEMS industry faces in the current and future market scenarios.
Practical MEMS: A Comprehensive Guide to Microsystem Design and Analysis by Ville Kaajakari